Structure of nanoporous VNx thin films obtained by ion-beam assisted deposition technology
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DOI: 10.1016/j.tsf.2018.09.041
Abstract: Abstract Nanocrystalline porous VNx films obtained by ion-beam assisted deposition of vanadium on silicon substrates were investigated in this work. The influence of deposition time and film thickness on the regularities of the formation of… read more here.
Keywords: ion beam; beam assisted; deposition; obtained ion ... See more keywords