Evaluation of the Annealing Induced Warpage of an Electrodeposited-Au Octagonal Proof Mass with a Ti/Au Multi-Layered Structure toward MEMS Capacitive Accelerometers
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DOI: 10.1149/1945-7111/ae11d5
Abstract: Annealing effects of the fabrication process on the concave warpage deformation of an electrodeposited-Au octagonal proof mass with a Ti/Au multi-layered structure are reported. The octagonal proof mass is fabricated by using multi-layer metal technology,… read more here.
Keywords: proof mass; multi; octagonal proof; mass ... See more keywords