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Published in 2018 at "Small"
DOI: 10.1002/smll.201803969
Abstract: A novel process is developed in which thin film transistors (TFTs) comprising one binary oxide for all transistor layers (gate, source/drain, semiconductor channel, and dielectric) are fabricated in a single deposition system at low temperature.…
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Keywords:
transistor layers;
oxide transistor;
transparent electronics;
one binary ... See more keywords