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Published in 2021 at "Micromachines"
DOI: 10.3390/mi12080891
Abstract: This paper presents modeling and analysis of light diffraction and light-intensity modulation performed by an optical phased array (OPA) system based on metal-coated silicon micromirrors. The models can be used in the design process of…
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Keywords:
phase;
diffraction;
order diffracted;
1st order ... See more keywords