Litho-Aware Machine Learning for Hotspot Detection
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DOI: 10.1109/tcad.2017.2750068
Abstract: In this paper, we propose a novel methodology for machine learning-based hotspot detection that uses lithography information to build support vector machine (SVM) during its learning process. Unlike previous studies that use only geometric information… read more here.
Keywords: machine; opc mask; hotspot detection; machine learning ... See more keywords