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Published in 2025 at "Optics Express"
DOI: 10.1364/oe.577054
Abstract: Large scale integration of chiplet based systems via passive alignment is of great interest for scalable packaging and implementation of current and future photonic and electronic systems. However, nanometer level alignment required for such photonic…
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Keywords:
optic systems;
alignment;
electro optic;
alignment platform ... See more keywords