Sign Up to like & get
recommendations!
1
Published in 2022 at "Optics letters"
DOI: 10.1364/ol.463807
Abstract: We demonstrate that the sensitivity of nanoparticle detection on surfaces can be substantially improved by implementing synthetic optical holography (SOH) in coherent Fourier scatterometry (CFS), resulting in a phase-sensitive confocal differential detection technique that operates…
read more here.
Keywords:
nanoparticle detection;
fourier scatterometry;
synthetic optical;
detection ... See more keywords