Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages
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DOI: 10.1016/j.measurement.2017.02.030
Abstract: Abstract We analyzed the parameter effects of an optical knife-edge sensor (OKES) and the measurement uncertainty to achieve high linearity, long range, and high accuracy for nanopositioning stage applications. The OKES utilizes interference fringes produced… read more here.
Keywords: optical knife; range; edge; knife edge ... See more keywords