Perspective: Optical measurement of feature dimensions and shapes by scatterometry
Sign Up to like & getrecommendations! Published in 2018 at "APL Materials"
DOI: 10.1063/1.5018310
Abstract: The use of optical scattering to measure feature shape and dimensions, scatterometry, is now routine during semiconductor manufacturing. Scatterometry iteratively improves an optical model structure using simulations that are compared to experimental data from an… read more here.
Keywords: measurement feature; feature; gaa transistor; perspective optical ... See more keywords
A new analytical method of the adhesive strength of coating based on optical measurement
Sign Up to like & getrecommendations! Published in 2018 at "Ferroelectrics"
DOI: 10.1080/00150193.2018.1453192
Abstract: ABSTRACT In order to measure the adhesive strength of coating more precise and accurate, non-contact three coordinates measuring instrument based on the principle of laser auto-focusing was designed, which could work in the accuracy of… read more here.
Keywords: strength coating; adhesive strength; method adhesive; optical measurement ... See more keywords
Blood-pH Optical Measurement: A Model to Compensate for the Effects of Temperature
Sign Up to like & getrecommendations! Published in 2023 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2023.3250282
Abstract: Under physiological conditions, the human body maintains blood pH within [7.36, 7.44] pH. Small deviations from this range can reveal the onset of pathological states and worsen the patient’s condition. This article reports the performance… read more here.
Keywords: temperature; blood optical; blood temperature; optical measurement ... See more keywords
Experimental comparison of a macroscopic draping simulation for dry non-crimp fabric preforming on a complex geometry by means of optical measurement
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DOI: 10.1177/0021998316670477
Abstract: Scope of the presented work is a detailed comparison of a macroscopic draping model with real fibre architecture on a complex non-crimp-fabric preform using a new robot-based optical measurement system. By means of a preliminary… read more here.
Keywords: geometry; crimp fabric; non crimp; optical measurement ... See more keywords
High-precision calibration to zoom lens of optical measurement machine based on FNN.
Sign Up to like & getrecommendations! Published in 2022 at "Optics express"
DOI: 10.1364/oe.459771
Abstract: We proposed a calibration method for high-precision zoom lenses of optical measurement machines based on Fully Connected Neural Network (FNN), using a 5-layer neural network instead of a camera calibration model, to achieve continuous calibration… read more here.
Keywords: zoom; high precision; calibration; optical measurement ... See more keywords
Encoding method of CGH for highly accurate optical measurement based on non-maxima suppression
Sign Up to like & getrecommendations! Published in 2017 at "Chinese Optics Letters"
DOI: 10.3788/col201715.111201
Abstract: The use of a computer-generated hologram (CGH) in interferometric testing provides new methods for highly accurate optical measurement. To fabricate a CGH, polygons are used to approximate the smooth CGH pattern. Because the data size… read more here.
Keywords: cgh; encoding method; highly accurate; accurate optical ... See more keywords