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   Articles with "optical metrology" as a keyword



2D Super‐Resolution Metrology Based on Superoscillatory Light

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recommendations! Published in 2024 at "Advanced Science"

DOI: 10.1002/advs.202404607

Abstract: Progress in the semiconductor industry relies on the development of increasingly compact devices consisting of complex geometries made from diverse materials. Precise, label‐free, and real‐time metrology is needed for the characterization and quality control of… read more here.

Keywords: superoscillatory light; optical metrology; metrology; resolution metrology ... See more keywords

Non-Markovian effect on quantum optical metrology under a dissipative environment

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recommendations! Published in 2020 at "Physical Review A"

DOI: 10.1103/physreva.101.022115

Abstract: Quantum metrology utilizes quantum effects to reach higher precision measurements of physical quantities compared with their classical counterparts. However the ubiquitous decoherence obstructs its application. Recently, non-Markovian effects are shown to be effective in performing… read more here.

Keywords: markovian effect; non markovian; quantum optical; metrology ... See more keywords
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Machine Learning on Multiplexed Optical Metrology Pattern Shift Response Targets to Predict Electrical Properties

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recommendations! Published in 2024 at "IEEE Transactions on Semiconductor Manufacturing"

DOI: 10.1109/tsm.2023.3339330

Abstract: Doing high throughput high accuracy metrology in small geometries is challenging. One approach is to build easily measurable proxy targets onto dies and make a predictive model based on those signals. We use optical Pattern… read more here.

Keywords: optical metrology; shift response; metrology; machine learning ... See more keywords

Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

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recommendations! Published in 2023 at "Micromachines"

DOI: 10.3390/mi14061142

Abstract: Complex optical elements have the advantages of improving image quality and optical performance and expanding the field of view. Therefore, it is widely used in X-ray scientific devices, adaptive optical elements, high-energy laser systems, and… read more here.

Keywords: optical metrology; focal plane; complex optical; metrology ... See more keywords

A Review of Optical Metrology Techniques for Advanced Manufacturing Applications

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recommendations! Published in 2025 at "Micromachines"

DOI: 10.3390/mi16111224

Abstract: Advanced manufacturing places stringent demands on measurement technologies, requiring ultra-high precision, non-contact operation, high throughput, and real-time adaptability. Optical metrology, with its distinct advantages, has become a key enabler in this context. This paper reviews… read more here.

Keywords: optical metrology; metrology techniques; metrology; advanced manufacturing ... See more keywords