Directed self-assembly of a high-chi block copolymer for the fabrication of optical nanoresonators.
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DOI: 10.1039/c8nr05831h
Abstract: In this paper, we report on the fabrication of optical nanoresonators using block copolymer lithography. The nanostructured gratings or nanofins were fabricated using a silicon-containing block copolymer on a chromium coated silicon-on-insulator substrate. The etch… read more here.
Keywords: block copolymer; block; optical nanoresonators; fabrication optical ... See more keywords