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Published in 2020 at "Measurement"
DOI: 10.1016/j.measurement.2019.107090
Abstract: Abstract Optical pressure measurement systems can precisely measure pressure from vacuum to high pressure with a single apparatus. However, the continuously measurable range without interrupting measurement is limited to less than 1 kPa. In this study,…
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Keywords:
pressure;
system;
range;
measurement ... See more keywords
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Published in 2020 at "Measurement"
DOI: 10.1016/j.measurement.2020.108496
Abstract: Abstract An optical pressure measurement system using Fabry–Perot (FP) cavities are being developed in several national metrology institutes as a future pressure standard. One of the challenges in these research endeavors is the deformation of…
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Keywords:
pressure standard;
optical pressure;
pressure;
mirror deformation ... See more keywords
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Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2016.12.010
Abstract: Optical pressure sensors can operate in certain harsh application areas where the electrical pressure sensors cannot. However, the sensitivity is often not as good for the optical sensors. This work presents an all optical pressure…
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Keywords:
pressure sensors;
fabrication process;
sensor;
optical pressure ... See more keywords
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Published in 2022 at "Inorganic chemistry"
DOI: 10.1021/acs.inorgchem.1c03674
Abstract: Ultrasensitive pressure-induced optical materials are of great importance owing to their potential applications in optical pressure sensors. However, the lack of outstanding pressure sensitivity, observable color evolution, and structure reliability limits their further development in…
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Keywords:
pressure sensors;
optical pressure;
ultrasensitive pressure;
pressure ... See more keywords
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Published in 2017 at "Optical Engineering"
DOI: 10.1117/1.oe.56.5.057108
Abstract: Abstract. Design guidelines for a guided-wave optical pressure sensor based on dependences of sensitivity and resonance frequency on diaphragm dimensions were considered. The guided-wave optical pressure sensor consists of a diaphragm and a single-mode waveguide…
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Keywords:
diaphragm;
pressure sensor;
wave optical;
guided wave ... See more keywords
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Published in 2022 at "Optics letters"
DOI: 10.1364/ol.476637
Abstract: A sensitivity-enhanced optical pressure sensor based on molybdenum disulfide (MoS2) is proposed. The sensing principle is that the pressure causes the deformation of the polydimethylsiloxane (PDMS) pressure structure above the MoS2 film, leading to the…
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Keywords:
pressure sensor;
optical pressure;
sensor based;
film ... See more keywords