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Published in 2020 at "Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture"
DOI: 10.1177/0954405420937534
Abstract: Micro-optics and micro-structures play important roles in the field of optics. A multi-step processing strategy with the combination of various processing technologies has been applied to fabricate micro-optics and micro-structures. However, the multi-step processing method…
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Keywords:
fused silica;
optics;
co2 laser;
micro optics ... See more keywords