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Published in 2018 at "Optoelectronics, Instrumentation and Data Processing"
DOI: 10.3103/s8756699018020012
Abstract: Recent research in the field of formation of a 3D profile of optical elements with the use of direct laser writing at various wavelengths and photolithographic technologies on the basis of photomasks fabricated by means…
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Keywords:
optics part;
laser;
micro optics;
technologies micro ... See more keywords