Optimal waveforms for capacitively coupled ionization in nanosecond plasma discharges
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DOI: 10.1088/1361-6595/aae5c2
Abstract: Optimal voltage waveforms for capacitively coupled plasma discharges are numerically investigated using a particle-in-cell kinetic model. The focus is on nanosecond time scales where the transient plasma response and charge separation in the plasma can… read more here.
Keywords: waveforms capacitively; plasma; optimal waveforms; plasma discharges ... See more keywords