Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity
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DOI: 10.3390/mi11070651
Abstract: In scanning laser projection systems, the laser modulation time is important for the projection resolution. The modulation time needs to be matched with the motion of the micromirror. For this paper, the piezoresistive sensor was… read more here.
Keywords: optimization moems; time; piezoresistive sensor; sensitivity ... See more keywords