Design optimization for an SOI MOEMS accelerometer
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DOI: 10.1007/s00542-017-3370-4
Abstract: With optimization being vital, the design optimization of a silicon-on-insulator (SOI) micro-opto-electro-mechanical systems accelerometer is discussed in this paper. This process has enabled a simplistic design that employs double-sided deep reactive ion etching (DRIE) on… read more here.
Keywords: soi moems; optimization soi; design optimization; optimization ... See more keywords