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Published in 2020 at "IEEE/ASME Transactions on Mechatronics"
DOI: 10.1109/tmech.2020.2969355
Abstract: Atomic force microscopy (AFM) generally relies on a raster scanning method to obtain the sample morphology, which limits its scanning speed and application prospect. To solve this issue, this article proposes an optimized scanning-based fast…
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Keywords:
based afm;
method;
scanning based;
optimized scanning ... See more keywords