Characteristics of Optimized Al:ZnO sputtering targets prepared by nanostructured powder
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DOI: 10.1016/j.ceramint.2019.11.103
Abstract: Abstract Optimized Al:ZnO sputtering target was prepared by cold isostatic pressing (CIP) using nanostructured zinc oxide powder and aluminum oxide powder as raw material. Compared with the target prepared by conventional raw materials, the performance… read more here.
Keywords: optimized zno; zno; target; powder ... See more keywords