High optoelectronic quality of AZO films grown by RF-magnetron sputtering for organic electronics applications
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DOI: 10.1088/1361-6641/acd13d
Abstract: Aluminum-doped zinc oxide thin films, known by the acronym AZO, were grown by radio-frequency magnetron sputtering method (rf-magnetron sputtering) onto glass substrate at room temperature and without posterior heat treatment. The impact on the structural,… read more here.
Keywords: organic electronics; optoelectronic quality; azo films; high optoelectronic ... See more keywords