Layer-Ordered Organooxotin Clusters for Extreme-Ultraviolet Photolithography.
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DOI: 10.1021/acsami.4c06009
Abstract: Extreme-ultraviolet (EUV) photolithography, which enables the high-throughput production of well-defined patterns with critical dimensions on the scale of several nanometers, is essential for the fabrication of a highly integrated semiconductor. The full exploitation of EUV… read more here.
Keywords: photolithography; organooxotin clusters; ordered organooxotin; extreme ultraviolet ... See more keywords