Direct Determination of Medium Range Ordering in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications
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DOI: 10.1017/s143192762001394x
Abstract: During past decades, the frequency of micro-processors has increased from 66MHz to 4 GHz while their sizes have decreased from 1 μm to 90 nm. As the size of interconnections (Fig. 1a) reduces, the conductors’… read more here.
Keywords: ordering amorphous; medium range; determination medium; amorphous hydrogenated ... See more keywords