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Published in 2019 at "Nature Communications"
DOI: 10.1038/s41467-019-10412-9
Abstract: Multilevel metal interconnects are crucial for the development of large-scale organic integrated circuits. In particular, three-dimensional integrated circuits require a large number of vertical interconnects between layers. Here, we present a novel multilevel metal interconnect…
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Keywords:
integrated circuits;
stacked organic;
organic integrated;
metal ... See more keywords