Tests for position and orientation errors of axes of a 2D rotary stage
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DOI: 10.1088/1361-6501/ab8ee7
Abstract: 2D rotary stages are applied in many manufacture equipment. Besides inherent geometric errors in each axis, the position and orientation errors between the two axes are also important position independent geometric errors. Considering the existing… read more here.
Keywords: rotary stage; position; orientation errors; position orientation ... See more keywords