Realization of preferential (100) oriented AlN thin films on Mo coated Si substrate using reactive RF magnetron sputtering
Sign Up to like & getrecommendations! Published in 2021 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2021.149308
Abstract: Abstract a-axis (100) oriented Aluminium Nitride (AlN) favours transverse acoustic wave applications. We have been able to realize preferential (100) oriented AlN films on Molybdenum (Mo) coated Si substrate using reactive RF magnetron sputtering. X-ray… read more here.
Keywords: oriented aln; coated substrate; spectroscopy; 100 oriented ... See more keywords
Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
Sign Up to like & getrecommendations! Published in 2017 at "Technical Physics Letters"
DOI: 10.1134/s1063785017010138
Abstract: The possibility of growing oriented AlN films on Al2O3 substrates at temperatures below 300°C by plasma-enhanced atomic layer deposition was examined. The samples were subjected to X-ray phase analysis and ellipsometry. It was demonstrated that… read more here.
Keywords: enhanced atomic; oriented aln; atomic layer; aln films ... See more keywords