Front-side releasing oriented clamped–clamped beams for piezoresistive sensors
Sign Up to like & getrecommendations! Published in 2023 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/acd126
Abstract: Front-side releasing suspended structures made using bulk micromachining processes have the advantages of simplifying vacuum or hermetic packaging processes and reducing squeeze-film damping. This paper studies the effect of doping concentration on the etching rate… read more here.
Keywords: clamped beams; front side; clamped clamped; 110 oriented ... See more keywords