Microstructure and texture of polycrystalline 3C–SiC thick films characterized via EBSD
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DOI: 10.1016/j.ceramint.2020.07.177
Abstract: Abstract Cubic silicon carbide (3C–SiC) is an excellent protective film on graphite and has been fabricated via laser chemical vapor deposition (LCVD) with an extremely high deposition rate by our research group. To understand comprehensively… read more here.
Keywords: polycrystalline sic; sic thick; thick films; oriented sic ... See more keywords
Preparation of highly oriented β-SiC bulks by halide laser chemical vapor deposition
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DOI: 10.1016/j.jeurceramsoc.2016.09.017
Abstract: Abstract Highly oriented β-SiC bulks with high hardness were fabricated by halide laser chemical vapor deposition (HLCVD) using SiCl 4 , CH 4 and H 2 as precursors. The effects of total pressure ( P… read more here.
Keywords: sic bulks; highly oriented; laser chemical; deposition ... See more keywords
A comparative study of high-quality C-face and Si-face 3C-SiC(1 1 1) grown on off-oriented 4H-SiC substrates
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DOI: 10.1088/1361-6463/ab2859
Abstract: We present a comparative study of the C-face and Si-face of 3C-SiC(111) grown on off-oriented 4H-SiC substrates by the sublimation epitaxy. By the lateral enlargement method, we demonstrate that th ... read more here.
Keywords: oriented sic; face; comparative study; face sic ... See more keywords