Subaperture stitching testing for fine flat mirrors with large apertures using an orthonormal polynomial fitting algorithm
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DOI: 10.1016/j.optlaseng.2019.02.017
Abstract: Abstract Interferometry, which measures the difference between a reference surface and a test surface, is widely used in high-precision testing. Usually the reference surface is considered as perfect and the surface errors there can be… read more here.
Keywords: surface; reference surface; polynomial fitting; orthonormal polynomial ... See more keywords