MEMS PZT Oscillating Platform for Fine Dust Particle Removal at Resonance
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DOI: 10.1007/s12541-018-0214-9
Abstract: Micro-electromechanical systems (MEMS) sensors designed to sense fine particles on the surface apply electrical signals to identify the corresponding physical changes on the surface. These sensors have limitations when the accumulated fine particles saturate the… read more here.
Keywords: oscillating platform; resonance; fine particles; platform ... See more keywords