Diamond-like carbon coatings deposited by deep oscillation magnetron sputtering in Ar-Ne discharges
Sign Up to like & getrecommendations! Published in 2019 at "Diamond and Related Materials"
DOI: 10.1016/j.diamond.2019.107521
Abstract: Abstract In a previous work, the authors have shown that a recently developed variant of high power impulse magnetron sputtering (HiPIMS), called deep oscillation magnetron sputtering (DOMS), was suitable for the deposition of hard hydrogen-free… read more here.
Keywords: oscillation magnetron; deep oscillation; discharge; magnetron ... See more keywords
Deposition of AlN films for acoustic biosensors by deep oscillation magnetron sputtering: effect of bias voltage
Sign Up to like & getrecommendations! Published in 2018 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2018.08.022
Abstract: Abstract The present study showed that Deep Oscillation Magnetron Sputtering (DOMS) has an excellent potential to produce AlN films for biosensing applications. However, careful control of the process parameters is required to attain the desired… read more here.
Keywords: magnetron sputtering; microscopy; effect bias; deep oscillation ... See more keywords
Multifunctional MoOx and MoOxNy films with 2.5 < x < 3.0 and y < 0.2 prepared using controlled reactive deep oscillation magnetron sputtering
Sign Up to like & getrecommendations! Published in 2021 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2020.138442
Abstract: Abstract Reactive deep oscillation magnetron sputtering with a pulsed reactive gas flow control and to-substrate reactive gas injection into the high-density plasma in front of the sputtered Mo target was used for a low-temperature ( read more here.
Keywords: magnetron sputtering; reactive deep; deep oscillation; oscillation magnetron ... See more keywords