Virtual commissioning for an Overhead Hoist Transporter in a semiconductor FAB
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DOI: 10.1080/00207543.2019.1685712
Abstract: Presented in the paper is a virtual commissioning methodology for the design and verification of an OHT (Overhead Hoist Transporter), which is a vehicle that travels on the overhead track in a FAB (Factory for… read more here.
Keywords: virtual commissioning; methodology; hoist transporter; overhead hoist ... See more keywords