Overlap junctions for high coherence superconducting qubits
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DOI: 10.1063/1.4993937
Abstract: Fabrication of sub-micron Josephson junctions is demonstrated using standard processing techniques for high-coherence, superconducting qubits. These junctions are made in two separate lithography steps with normal-angle evaporation. Most significantly, this work demonstrates that it is… read more here.
Keywords: overlap junctions; coherence; superconducting qubits; coherence superconducting ... See more keywords