Multi-step overlap path for suppressing mid-spatial frequency error in bonnet polishing
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DOI: 10.1364/oe.580274
Abstract: Bonnet polishing has been extensively applied in the fabrication of optical components due to its high material removal efficiency and superior surface-shaping capability. However, the conventional raster polishing path inevitably introduces mid-spatial frequency (MSF) error.… read more here.
Keywords: step overlap; multi step; msf error; overlap path ... See more keywords