Numerical Study on the Laser Annealing of Silicon Used in Advanced V-NAND Device
Sign Up to like & getrecommendations! Published in 2022 at "Materials"
DOI: 10.3390/ma15124201
Abstract: Laser melt annealing of amorphous silicon (a-Si) and subsequent recrystallization of a-Si are essential processes for successfully implementing vertical NAND (V-NAND) flash memory devices developed based on the cell-over-periphery (COP) structure. The aim of this… read more here.
Keywords: laser; temperature; nand; overlap ratio ... See more keywords
Femtosecond Laser Engraving of Deep Patterns in Steel and Sapphire
Sign Up to like & getrecommendations! Published in 2021 at "Micromachines"
DOI: 10.3390/mi12070804
Abstract: Femtosecond laser engraving offers appealing advantages compared to regular laser engraving such as higher precision and versatility. In particular, the inscription of deep patterns exhibits an increasing interest in industry. In this work, an optimization… read more here.
Keywords: laser; deep patterns; femtosecond laser; laser engraving ... See more keywords