Protection of Cu from Oxidation by Ta Capping Layer
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DOI: 10.3390/coatings13050926
Abstract: X-ray reflectometry (XRR) and X-ray photoelectron spectroscopy (XPS) measurements (core levels and valence bands) were made of Cu thin films that were prepared and coated by capping Ta layers with different thicknesses (5, 10, 15,… read more here.
Keywords: oxidation; protection oxidation; layer; oxidation capping ... See more keywords