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Published in 2020 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.144200
Abstract: Abstract Motivated by our recent research presenting the effect of dry oxidation on crack propagation of Si nanofilm, water environment was taken into account in this work to clarify how crack propagates accompanied by initial…
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Keywords:
oxidation;
wet oxidation;
oxidation crack;
crack propagation ... See more keywords