Growth mechanisms and characteristics of Sm2O3 based on Ge semiconductor through oxidation and nitridation
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DOI: 10.1016/j.apsusc.2021.148949
Abstract: Abstract A systematic study of chemical, structural and electrical properties of Sm2O3 gate stack has been carried out for RF sputtered Sm thin film on Ge substrate followed by thermal oxidation and nitridation at different… read more here.
Keywords: growth mechanisms; spectroscopy; oxidation nitridation;