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Published in 2020 at "Optics express"
DOI: 10.1364/oe.393729
Abstract: We report on the design, fabrication and characterization of subwavelength grating metamaterial waveguides coated with tellurium oxide. The structures are first fabricated using a standard CMOS compatible process on a silicon-on-insulator platform. Amorphous tellurium oxide…
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Keywords:
subwavelength grating;
oxide cladding;
metamaterial waveguides;
tellurium oxide ... See more keywords