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Published in 2022 at "Small"
DOI: 10.1002/smll.202107575
Abstract: Hafnium oxide (HfO2 ) is one of the mature high-k dielectrics that has been standing strong in the memory arena over the last two decades. Its dielectric properties have been researched rigorously for the development…
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Keywords:
oxide hfo2;
hfo2 multifunctional;
memory;
hafnium oxide ... See more keywords