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Published in 2022 at "ACS Omega"
DOI: 10.1021/acsomega.2c00813
Abstract: AlGaN and GaN sidewalls were turned into AlxGa2–xO3 and Ga2O3, respectively, by thermal oxidation to improve the optoelectrical characteristics of deep ultraviolet (DUV) light-emitting diodes (LEDs). The thermally oxidized Ga2O3 is a single crystal with…
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Keywords:
oxidized alxga2;
thermally oxidized;
layer;
alxga2 ... See more keywords