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Oxidized Metal Schottky Contacts on (010) $\beta$ -Ga 2 O 3

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1 Published in 2019 at "IEEE Electron Device Letters"

DOI: 10.1109/led.2019.2891304

Abstract: Oxidized Ir, Pd, Pt, Ag, and Au Schottky contacts (SCs) were fabricated on (010) $\beta $ -Ga2O3 single crystal substrates via reactive RF sputtering using an O2: Ar plasma. The use of in situ oxidizing… read more here.

Keywords: schottky contacts; metal; metal schottky; oxidized metal ... See more keywords