Performance enhancement of ZnGa2O4 Schottky type deep-ultraviolet photodetectors by oxygen supercritical fluid treatment
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DOI: 10.1016/j.rinp.2021.104764
Abstract: Abstract For semiconductor device applications such as FinFET, MEMS, 2D materials, and wide bandgap materials, reliability is one of the most powerful key factors for commercialization in the industry. ZnGa2O4 deep ultraviolet (DUV) photodetectors (PDs)… read more here.
Keywords: deep ultraviolet; performance; treatment; znga2o4 ... See more keywords