Effect of UV/ozone plasma treatment on sol–gel-derived HfO2 thin films
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DOI: 10.1016/j.ceramint.2016.10.059
Abstract: Abstract This study reports on the fabrication and characterization of sol–gel-derived HfO2 thin films on indium tin oxide (ITO) substrates. The films were dried in air and ultraviolet (UV)/ozone plasma environments and finally annealed at… read more here.
Keywords: thin films; plasma; ozone plasma; gel derived ... See more keywords