Passivation improvement of nitric acid oxide by ozone post-treatment for tunnel oxide passivated contacts silicon solar cells
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DOI: 10.1016/j.apsusc.2019.05.369
Abstract: Abstract We demonstrate the passivation improvement of tunnel oxide formed by nitric acid oxidation and followed by ozone post-treatment. A tunnel oxide passivated contacts (TOPCon) structure was fabricated through polysilicon crystallization using POCl3 diffusion on… read more here.
Keywords: ozone post; tunnel oxide; nitric acid; post treatment ... See more keywords