Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage
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DOI: 10.1016/j.rcim.2017.11.006
Abstract: Abstract Limited travel stroke constrains the application of existing XYZ parallel micro/nano-positioning stages. In this paper, a novel parallel-kinematic symmetrical micro/nano-positioning stage is proposed to enlarge the travel range with a compact physical size. For… read more here.
Keywords: parallel micro; positioning stage; micro nano; stage ... See more keywords