Parallel Tensile Testing of Single-crystal Silicon Microstructures with Integrated Piezoresistive Strain Gauges
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DOI: 10.18494/sam.2018.1946
Abstract: A parallel testing method has been proposed with integrated strain gauges based on the piezoresistive effect to shorten the testing time for investigating tensile-mode fatigue characteristics of single-crystal silicon (SCS). The method allows a high… read more here.
Keywords: parallel tensile; single crystal; crystal silicon; strain gauges ... See more keywords