Digital Twin-Based Optimization of Operational Parameters for Cluster Tools in Semiconductor Manufacturing
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DOI: 10.1109/access.2024.3450869
Abstract: Manufacturing and supply chain management are becoming increasingly important in the semiconductor industry. Cluster tools are essential equipment in semiconductor production and are used for microscopic operations, such as the surface treatment of wafers. In… read more here.
Keywords: operational parameters; digital twin; semiconductor manufacturing; parameters cluster ... See more keywords