The influence of oxygen deficiency on the dispersion parameters of TiO2 films
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DOI: 10.1142/s0217984921501426
Abstract: TiO2 thin films were deposited on quartz substrate by RF-magnetron sputtering technique. The effect of varying oxygen fraction f(O2) = (O2/(Ar + O2) on the surface morphology, structure, electrical... read more here.
Keywords: influence oxygen; tio2 films; dispersion parameters; oxygen deficiency ... See more keywords