Parasitic Resistance-Based High Precision Capacitive MEMS Accelerometer Phase Shift and Its Usage for Temperature Compensation
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DOI: 10.1109/jsen.2017.2777864
Abstract: A novel parasitic resistance-based high precision capacitive MEMS accelerometer temperature compensation method is proposed. The performance of MEMS accelerometer is severely affected by temperature drift. After a careful modeling analysis of the MEMS sensor, it… read more here.
Keywords: resistance based; parasitic resistance; temperature; temperature compensation ... See more keywords