Energy partitioning and its influence on surface scatter coefficients within fluorinated inductively coupled plasmas
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DOI: 10.1116/1.4990682
Abstract: Energy partitioning for molecules formed from fluorinated plasma systems has been measured using laser-induced fluorescence, optical emission, and broadband absorption spectroscopies. For the two radicals discussed here, SiF in tetrafluorosilane plasmas, and CF in CxFy-type… read more here.
Keywords: plasmas; surface scatter; energy partitioning; energy ... See more keywords